By Author Unknown

ISBN-10: 0080577148

ISBN-13: 9780080577142

ISBN-10: 0120146495

ISBN-13: 9780120146499

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Rejecting System Containing Substrate and Very Thin Transparent Film The term “very thin” means that the inequality d f / l << 1 is satisfied. The satisfaction of this inequality denotes that all the exponents in expression (54) can be replaced by the expansions in a power series limited by the members containing the first powers of df/l only. Taking this into account, after simple transformations we can reduce Eq. I - a1N M’ N’ + (58) 4R C , = - no(# - n2,)cos ‘posin’ ‘po N [ ( l / n : ) - a] - a,M M2 N2 (59) 4R cA -- no($ 1 1 - + ELLIPSOMETRIC STUDIES OF SURFACES AND THIN FILMS 19 and ji is the relative reflectivity coefficient for a “clean” film-free surface.

K. SVITASHEV deal with quasi-monochromatic and quasi-parallel light beams. In this connection, when carrying out ellipsometric investigations, one should clearly realize the approximate character of reflectivity calculations performed by the above-mentioned procedure and should consciously follow one of two possible courses: 1. To carry out experiments using a carefully collimated, highly monochromatic light beam and to use the values of the relative reflectivity coefficient, calculated in approximation of a plane monochromatic wave.

However, the coefficients CA and C, were determined inaccurately. More precise values of CAand C,, which were in agreement with expressions (58)-(61), were obtained by Archer and Gobeli (1965). It was Saxena (1965b) who made a detailed comparison between the approximate equations (65) and (66) and the exact equation (54). In particular, Saxena showed that it would be expedient to replace Eq. d2sin2$ (67) Equation (67) follows from Eqs. (63) and (64). The assumption of the smallness of the value of (A - A) is of no use when deriving Eq.

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Advances in Electronics and Electron Phisics. Vol. 49 by Author Unknown


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